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1

Optimum Placement of Phasor Measurement Units in Power Systems

Sun, Lu, Chen, Tengpeng, Chen, Xuebing, Ho, Weng Khuen, Ling, Keck-Voon, Tseng, King-Jet, Amaratunga, Gehan A. J.

Journal:

IEEE Transactions on Instrumentation and Measurement

Year:

2018

Language:

english

File:

PDF, 2.75 MB

english, 2018

2

Tuning of PID controllers based on gain and phase margin specifications

Weng Khuen Ho, Chang Chieh Hang, Lisheng S. Cao

Journal:

Year:

1995

Language:

english

File:

PDF, 614 KB

english, 1995

3

The intelligent alarm management system

Jun Liu, Khiang Wee Lim, Weng Khuen Ho, Kay Chen Tan, Srinivasan, R., Tay, A.

Journal:

Year:

2003

Language:

english

File:

PDF, 453 KB

english, 2003

4

Self-tuning PID control of a plant with under-damped response with specifications on gain and phase margins

Weng Khuen Ho,, Chang Chieh Hang,, Junhong Zhou,

Journal:

IEEE Transactions on Control Systems Technology

Year:

1997

Language:

english

File:

PDF, 228 KB

english, 1997

5

Estimation of wafer warpage profile during thermal processing in microlithography

Tay, Arthur, Ho, Weng Khuen, Hu, Ni, Chen, Xiaoqi

Journal:

Review of Scientific Instruments

Year:

2005

Language:

english

File:

PDF, 767 KB

english, 2005

6

RTD Response Time Estimation in the Presence of Temperature Variations and Its Application to Semiconductor Manufacturing

Woei Wan Tan, Li, R.F.Y., Ai Poh Loh, Weng Khuen Ho

Journal:

IEEE Transactions on Instrumentation and Measurement

Year:

2008

Language:

english

File:

PDF, 598 KB

english, 2008

7

[IEEE International Symposium on Intelligent Control - Vancouver, BC, Canada (27-30 Oct. 2002)] Proceedings of the IEEE Internatinal Symposium on Intelligent Control - Run-to-run process control for chemical mechanical polishing in semiconductor manufacturing

Da, L., Kumar, V.G., Tay, A., Al Mamun, A., Weng Khuen Ho,, See, A., Chan, L.

Year:

2002

Language:

english

File:

PDF, 577 KB

english, 2002

8

Coordinate control of air movement for optimal thermal comfort

Liu, Shuo, Yin, Le, Schiavon, Stefano, Ho, Weng Khuen, Ling, Keck Voon

Journal:

Science and Technology for the Built Environment

Year:

2018

Language:

english

File:

PDF, 2.19 MB

english, 2018

9

Full Coverage of Optimal Phasor Measurement Unit Placement Solutions in Distribution Systems Using Integer Linear Programming

Chen, Xuebing, Sun, Lu, Chen, Tengpeng, Sun, Yuhao, Rusli,, Tseng, King Jet, Ling, Keck Voon, Ho, Weng Khuen, Amaratunga, Gehan A. J.

Journal:

Year:

2019

Language:

english

File:

PDF, 1006 KB

english, 2019

10

SPIE Proceedings [SPIE Microelectronic and MEMS Technologies - Edinburgh, United Kingdom (Wednesday 30 May 2001)] Process and Equipment Control in Microelectronic Manufacturing II - Spatially programmable thermal processing module for 300-mm wafer processing

Tay, Arthur E., Lim, Khiang W., Loh, Ai Poh, Tan, Woei Wan, Ho, Weng Khuen, Huang, Anya, Jun, Fu, Fallon, Martin

Year:

2001

Language:

english

File:

PDF, 272 KB

english, 2001

11

A tracking cooling fan using geofence and camera-based indoor localization

Liu, Shuo, Yin, Le, Ho, Weng Khuen, Ling, Keck Voon, Schiavon, Stefano

Journal:

Building and Environment

Year:

2017

Language:

english

File:

PDF, 1.78 MB

english, 2017

12

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2008)] Metrology, Inspection, and Process Control for Microlithography XXII - CD uniformity control via real-time control of photoresist properties

Chen, Ming, Allgair, John A., Raymond, Christopher J., Fu, Jun, Ho, Weng Khuen, Tay, Arthur

Year:

2008

Language:

english

File:

PDF, 223 KB

english, 2008

13

Fault Detection of Wafer Warpage

Ho, Weng Khuen, Yap, Christopher, Tay, Arthur, Chen, Wei, Zhou, Ying, Tan, Woei Wan, Chen, Ming

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2007

Language:

english

File:

PDF, 625 KB

english, 2007

14

[IEEE 2004 8th International Conference on Control, Automation, Robotics and Vision (ICARCV) - Kunming, China (6-9 Dec. 2004)] ICARCV 2004 8th Control, Automation, Robotics and Vision Conference, 2004. - Detection of wafer warpages during thermal processing in microlithography

Weng Khuen Ho,, Tay, A., Ying Zhou,, Kai Yang,, Ni Hu,

Year:

2004

Language:

english

File:

PDF, 1.11 MB

english, 2004

15

The direct Nyquist array design of PID controllers

Weng Khuen Ho, Tong Heng Lee, Wen Xu, Zhou, J.R., Ee Beng Tay

Journal:

IEEE Transactions on Industrial Electronics

Year:

2000

Language:

english

File:

PDF, 285 KB

english, 2000

16

PROCESSING OF SEMICONDUCTOR QUARTZ PHOTOMARKS ON BAKE-PLATES

HO, Weng Khuen, TAY, Arthur, LIM, Khiang Wee

Journal:

IFAC Proceedings Volumes

Year:

2002

Language:

english

File:

PDF, 198 KB

english, 2002

17

Critical Dimension Uniformity Via Real-Time Photoresist Thickness Control

Weng Khuen Ho,, Tay, A., Ming Chen,, Jun Fu,, Haijing Lu,, Xuechuan Shan,

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2007

Language:

english

File:

PDF, 780 KB

english, 2007

18

[IEEE 2000 TENCON Proceedings. Intelligent Systems and Technologies for the New Millennium - Kuala Lumpur, Malaysia (24-27 Sept. 2000)] 2000 TENCON Proceedings. Intelligent Systems and Technologies for the New Millennium (Cat. No.00CH37119) - Diagnosability of faults using finite-state automaton model

YunXia Xi,, Khiang-Wee Lim,, Weng-Khuen Ho,, Preisig, H.A.

Year:

2000

Language:

english

File:

PDF, 377 KB

english, 2000

19

SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Data Analysis and Modeling for Process Control II - Real-time control of photoresist absorption coefficient uniformity

Tay, Arthur, Emami, Iraj, Ho, Weng-Khuen, Wu, Xiaodong, Tsai, Kuen-Yu

Year:

2005

Language:

english

File:

PDF, 583 KB

english, 2005

20

ON CONTROL OF RESIST FILM UNIFORMITY IN THE MICROLITHOGRAPHY PROCESS

Khuen, Ho Weng, Lay, Lee Lay, Schaper, Charles

Journal:

IFAC Proceedings Volumes

Year:

2002

Language:

english

File:

PDF, 159 KB

english, 2002

21

[IEEE 30th Annual Conference of IEEE Industrial Electronics Society, 2004. IECON 2004 - Busan, South Korea (2-6 Nov. 2004)] 30th Annual Conference of IEEE Industrial Electronics Society, 2004. IECON 2004 - Temperature control and in-situ fault detection of wafer warpage

Weng Khuen Ho,, Yap, C., Tay, A., Wei Chen,, Khiang Wee Lim,

Year:

2004

Language:

english

File:

PDF, 973 KB

english, 2004

22

Critical dimension and real-time temperature control for warped wafers

Weng Khuen Ho, Arthur Tay, Jun Fu, Ming Chen, Yong Feng

Journal:

Journal of Process Control

Year:

2008

Language:

english

File:

PDF, 318 KB

english, 2008

23

SPIE Proceedings [SPIE Microlithography 2004 - Santa Clara, CA (Sunday 22 February 2004)] Advances in Resist Technology and Processing XXI - A novel wafer baking system using hot air streams

Wang, Lan, Sturtevant, John L., Chow, Siew Loong, Loh, Ai Poh, Gong, Zhi Ming, Tan, Woei Wan, Tay, Arthur E. B., Ho, Weng Khuen

Year:

2004

Language:

english

File:

PDF, 823 KB

english, 2004

24

Influence Function Analysis of Parameter Estimation with Generalized t Distribution Noise Model

Ho, Weng Khuen, Vu, Hoang Dung, Ling, Keck Voon

Journal:

Industrial & Engineering Chemistry Research

Year:

2013

Language:

english

File:

PDF, 1.56 MB

english, 2013

25

[IEEE 2006 International Symposium on Semiconductor Manufacturing (ISSM) - Tokyo, Japan (2006.09.25-2006.09.27)] 2006 IEEE International Symposium on Semiconductor Manufacturing - Real-time Monitoring of Photoresist Thickness Contour in Microlithography

Khuen, Ho Weng, Xiaoqi, Chen, Xiaodong, Wu, Tay, Arthur

Year:

2006

Language:

english

File:

PDF, 2.10 MB

english, 2006

26

Real-Time Control of Photoresist Extinction Coefficient Uniformity in the Microlithography Process

Tay, Arthur, Ho, Weng Khuen, Wu, Xiaodong

Journal:

IEEE Transactions on Control Systems Technology

Year:

2007

Language:

english

File:

PDF, 754 KB

english, 2007

27

[IEEE IECON'03. 29th Annual Conference of the IEEE Industrial Electronics Society (IEEE Cat. No.03CH37468) - Roanoke, VA, USA (Nov. 2-6, 2003)] IECON'03. 29th Annual Conference of the IEEE Industrial Electronics Society (IEEE Cat. No.03CH37468) - Warpage detection during baking of semiconductor substrate in microlithography

Weng Khuen Ho,, Tay, A., Khiang Wee Lim,, Ying Zhou,, Kai Yang,

Year:

2003

Language:

english

File:

PDF, 378 KB

english, 2003

28

SPIE Proceedings [SPIE Microelectronic Manufacturing '99 - Santa Clara, CA (Wednesday 22 September 1999)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing V - Optimal control strategy using linear programming for load disturbance compensation in thermal processing systems

Ho, Weng Khuen, Tay, Arthur E., Schaper, Charles D., Toprac, Anthony J., Dang, Kim

Year:

1999

Language:

english

File:

PDF, 625 KB

english, 1999

29

Variance analysis of robust state estimation in power system using influence function

Ho, Weng Khuen, Chen, Tengpeng, Ling, Keck Voon, Sun, Lu

Journal:

International Journal of Electrical Power & Energy Systems

Year:

2017

Language:

english

File:

PDF, 684 KB

english, 2017

30

Covariance Analysis of LAV Robust Dynamic State Estimation in Power Systems

Sun, Lu, Chen, Tengpeng, Ho, Weng Khuen, Ling, Keck Voon, Maciejowski, Jan M.

Journal:

IEEE Systems Journal

Year:

2019

Language:

english

File:

PDF, 4.69 MB

english, 2019

31

Editorial

S. Joe Qin, Weng Khuen Ho

Journal:

Journal of Process Control

Year:

2008

Language:

english

File:

PDF, 91 KB

english, 2008

32

Constraint feedforward control for thermal processing of quartz photomasks in microelectronics manufacturing

Arthur Tay, Weng Khuen Ho, Charles D. Schaper, Lay Lay Lee

Journal:

Journal of Process Control

Year:

2004

Language:

english

File:

PDF, 299 KB

english, 2004

33

[IEEE IECON 2007 - 33rd Annual Conference of the IEEE Industrial Electronics Society - Taipei, Taiwan (2007.11.5-2007.11.8)] IECON 2007 - 33rd Annual Conference of the IEEE Industrial Electronics Society - Measurement Bias Detection, Identification and Elimination for Multi-Zone Thermal Processing in Semiconductor Manufacturing

Ho, Weng Khuen, Yan, Han, Romagnoli, Jose A., Ling, Keck Voon

Year:

2007

Language:

english

File:

PDF, 3.89 MB

english, 2007

34

Approach to Real-Time Spatial Control of Steady-State Wafer Temperature During Thermal Processing in Microlithography

Tay, Arthur, Ho, Weng Khuen, Hu, Ni

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2007

Language:

english

File:

PDF, 1.01 MB

english, 2007

35

SPIE Proceedings [SPIE SPIE 31st International Symposium on Advanced Lithography - San Jose, CA (Sunday 19 February 2006)] Data Analysis and Modeling for Process Control III - Real-time spatial control of steady-state wafer temperature during thermal processing in microlithography

Tay, Arthur, Emami, Iraj, Tobin, Jr., Kenneth W., Ho, Weng-Khuen, Hu, Ni, Tsai, Kuen-Yu, Zhou, Ying

Year:

2006

Language:

english

File:

PDF, 745 KB

english, 2006

36

Optimal predictive control with constraints for the processing of semiconductor wafers on bake plates

Weng Khuen Ho,, Tay, A., Schaper, C.D.

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2000

Language:

english

File:

PDF, 279 KB

english, 2000

37

Multi-Zone Thermal Processing in Semiconductor Manufacturing: Bias Estimation

Han Yan,, Weng Khuen Ho,, Keck Voon Ling,, Khiang Wee Lim,

Journal:

IEEE Transactions on Industrial Informatics

Year:

2010

Language:

english

File:

PDF, 1.17 MB

english, 2010

38

Indoor Tracking With the Generalized t-Distribution Noise Model

Yin, Le, Liu, Shuo, Ho, Weng Khuen, Ling, Keck Voon

Journal:

IEEE Transactions on Control Systems Technology

Year:

2017

Language:

english

File:

PDF, 4.54 MB

english, 2017

39

Iterative Learning Approach Toward Closed-Loop Automatic Tuning of PID Controllers

Tan, Kok Kiong, Zhao, Shao, Chua, Kok Yong, Ho, Weng Khuen, Tan, Woei Wan

Journal:

Industrial & Engineering Chemistry Research

Year:

2006

Language:

english

File:

PDF, 252 KB

english, 2006

40

[IEEE IECON'99. Conference Proceedings. 25th Annual Conference of the IEEE Industrial Electronics Society - San Jose, CA, USA (29 Nov.-3 Dec. 1999)] IECON'99. Conference Proceedings. 25th Annual Conference of the IEEE Industrial Electronics Society (Cat. No.99CH37029) - Optimal control of conductive heating systems for microelectronics processing of silicon wafers and quartz photomasks

Weng Khuen Ho,, Tay, A., Schaper, C.D.

Year:

1999

Language:

english

File:

PDF, 558 KB

english, 1999

41

SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 25 February 2007)] Metrology, Inspection, and Process Control for Microlithography XXI - Real-time spatial control of photoresist development rate

Tay, Arthur, Archie, Chas N., Ho, Weng-Khuen, Hu, Ni, Kiew, Choon-Meng, Tsai, Kuen-Yu

Year:

2007

Language:

english

File:

PDF, 248 KB

english, 2007

42

Critical Dimension and Real-Time Temperature Control for Warped Wafers

HO, Weng Khuen, TAY, Arthur, FU, Jun, CHEN, Ming, FENG, Yong

Journal:

IFAC Proceedings Volumes

Year:

2008

Language:

english

File:

PDF, 360 KB

english, 2008

43

Control of photoresist film thickness: Iterative feedback tuning approach

Arthur Tay, Weng Khuen Ho, Jiewen Deng, Boon Keng Lok

Journal:

Computers & Chemical Engineering

Year:

2006

Language:

english

File:

PDF, 576 KB

english, 2006

44

[IEEE 2014 13th International Conference on Control Automation Robotics & Vision (ICARCV) - Singapore (2014.12.10-2014.12.12)] 2014 13th International Conference on Control Automation Robotics & Vision (ICARCV) - Improved indoor tracking based on generalized t-distribution noise model

Shuo, Liu, Le, Yin, Khuen, Ho Weng, Voon, Ling Keck

Year:

2014

Language:

english

File:

PDF, 276 KB

english, 2014

45

[IEEE 28th Annual Conference of the IEEE Industrial Electronics Society - Sevilla, Spain (5-8 Nov. 2002)] IEEE 2002 28th Annual Conference of the Industrial Electronics Society. IECON 02 - Control and signal processing for photoresist processing in microlithography

Tay, A., Weng Khuen Ho,, Khiang Wee Lim,, Ai Poh Loh,, Woei Wan Tan,

Year:

2002

Language:

english

File:

PDF, 412 KB

english, 2002

46

[ACM Press the 2018 4th International Conference - Valenciennes, France (2018.02.07-2018.02.11)] Proceedings of the 2018 4th International Conference on Mechatronics and Robotics Engineering - ICMRE 2018 - Computational Load Comparison of Multiplexed and Standard Model Predictive Control

Wang, XiaoQiong, Ho, Weng Khuen, Ling, Keck Voon

Year:

2018

Language:

english

File:

PDF, 942 KB

english, 2018

47

Filtering of the ARMAX Process with Generalized t -Distribution Noise: The Influence Function Approach

Ho, Weng Khuen, Ling, Keck Voon, Vu, Hoang Dung, Wang, Xiaoqiong

Journal:

Industrial & Engineering Chemistry Research

Year:

2014

Language:

english

File:

PDF, 2.35 MB

english, 2014

48

[IEEE IECON'01. 27th Annual Conference of the IEEE Industrial Electronics Society - Denver, CO, USA (29 Nov.-2 Dec. 2001)] IECON'01. 27th Annual Conference of the IEEE Industrial Electronics Society (Cat. No.37243) - Fault diagnosis using dynamic finite-state automaton models

Yun-Xia Xi,, Khiang-Wee Lim,, Weng-Khuen Ho,, Preisig, H.A.

Year:

2001

Language:

english

File:

PDF, 637 KB

english, 2001

49

SPIE Proceedings [SPIE Microelectronic Manufacturing - Santa Clara, CA (Monday 18 September 2000)] Process Control and Diagnostics - Real-time control of photoresist thickness uniformity during the bake process

Lee-Aquila, Lay Lay, Schaper, Charles D., Ho, Weng Khuen, Miller, Michael L., Ashtiani, Kaihan A.

Year:

2000

Language:

english

File:

PDF, 292 KB

english, 2000

50

[IEEE 2005 IEEE Instrumentationand Measurement Technology - Ottawa, ON, Canada (16-19 May 2005)] 2005 IEEE Instrumentationand Measurement Technology Conference Proceedings - In Situ Measurement & Control of Photoresist Develpment in Microlithorgraphy

Choon Meng Kiew,, Tay, A., Weng Khuen Ho,, Khiang Wee Lim,, Ying Zhou,

Year:

2005

Language:

english

File:

PDF, 563 KB

english, 2005

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